Drop in Process Control Checkerboard Test Structure for Efficient Online Process Characterization and Defect Problem Debugging
نویسندگان
چکیده
A novel diode-checkerboard test structure (DCTS) is presented to determine open circuit defects and short circuit defects as well as to investigate the 3D-influence of underlying topography. The arrangement of the DCTS in a standard boundary pad frame and the digitally measuring procedure evaluate a fast and effective (efficient) online process characterization. The precise defect detection and localization facilitate an additional optical defect problem debugging.
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